What problems should be paid attention to in the maintenance of vacuum coating equipment?

1. Maintenance and maintenance of vacuum system.

Pay attention to the cleaning of the sealing ring of the door of the coating chamber;

Regularly clean the coating chamber;

Pay attention to the ground wire when the device is shifted.

2. a substrate table.

It is recommended to control the substrate rotation at a lower rate;

Long-term use of high temperatures may cause deformation of the fixing substrate (sample) screws (screw holes);

Regularly check the insulation of the substrate table to the ground.

3. Electrical control.

Pay attention to prevent conductive materials from falling into the electrical cabinet;

When the equipment moves, first measure whether the power supply AC meets the requirements;

Turn on and off the switch and knob to the "off" position and "zero" position;

The equipment should be kept away from high-frequency sources and pollution sources.

Hope the above advice helps, thank you!

Dear, hello, I am happy to serve you, here for you to inquire about the common faults are: 1Leakage Issues:

In vacuum coater equipment, there may be gas leakage, which will lead to a decrease in the vacuum level and affect the coating effect. This condition is usually caused by reasons such as poor sealing or broken pipes. 2.

Heating problems: The heating system in the vacuum coater equipment may malfunction, and Kaihu can cause the temperature to be unstable or not reach the preset temperature, which can affect the coating effect. 3.

Gas Cleaning Problem: During the vacuum coating process, a large amount of gas and dust is generated and needs to be cleaned by a gas cleaning system. If the gas cleaning system fails, it can lead to a build-up of gases and dust, which can affect the coating results.

4.Power supply problems: The power supply system in the vacuum coater equipment may fail, resulting in unstable power supply or failure to supply power normally, which will affect the normal operation of the equipment.

5.Control system issues: The control system in the vacuum coater equipment may malfunction, resulting in the equipment not operating properly and affecting production efficiency.

6.Vacuum pump problem: The vacuum pump in the vacuum coater equipment may malfunction, causing the vacuum level to drop and affect the coating effect.

In addition, vacuum pumps may also wear out due to long-term use and need to be replaced in a timely manner. Contains reeds 7Vacuum chamber problem:

The vacuum chamber in the vacuum coater equipment may have problems such as air leakage and damage, which needs to be repaired or replaced in time to ensure the normal operation of the equipment.

Vacuum coating equipment is actually composed of many different parts, which are completed by various machining, such as turning, milling, planing, grinding, boring, welding, etc. As a result, the surface of the part will inevitably be stained with many contaminants such as processing grease, sweat marks, polishing paste, flux, metal shaving, oil scale, etc. These contaminants are volatile in a vacuum, affecting the ultimate pressure and performance stability of vacuum coating equipment.

In addition, pollutants adsorb a large number of gases at atmospheric pressure, which are also released in a vacuum environment, constituting a limiting factor for the ultimate pressure of vacuum coating equipment. For this reason, contaminants must be removed before the parts are assembled.

In addition, the parts of the vacuum coating equipment will be contaminated during use. This contamination is related to the conditions of use and the vacuum pump. For example:

The inner wall of the vacuum coater will be contaminated with the evaporation material; The mechanical pump oil of the vacuum pumping unit of the vacuum coating equipment is a source of pollution, and the equipment will form an obvious oil film inside the equipment after long-term work. These contaminants can likewise affect the performance of the equipment and should be removed at all times.

We are divided into daily cleaning and maintenance, daily cleaning, the coating to clean the part with a scouring pad, the protective plate with a sandblasting machine, it is best to wrap aluminum foil to avoid consumption, clean with alcohol wipe. If you can do it, disassemble all the parts except the accelerator pump, and reinstall the maintenance seal and actuating parts, which generally takes about a week.

Discharge cooling is another type of convection cooling. Unlike regenerative cooling, the coolant used for exhaust cooling absorbs heat to the thrust chamber and is discharged out of the combustion chamber instead of entering the combustion chamber to participate in combustion. Direct drain coolant reduces the thrust chamber specific impulse, so the coolant flow for drain cooling needs to be minimized while only using drain cooling at the outlet section of the nozzle that is relatively less heated.

There is also radiative cooling, in which the heat flow is transferred from the combustion products to the thrust chamber, and then the heat is radiated by the thrust chamber wall to the surrounding space. Radiative cooling is characterized by simplicity and small structural mass. It is mainly used in the extension section of large nozzles and the thrust chamber of small thrust engines using high-temperature resistant materials.

When cooling in the thrust chamber of the tissue, a relatively low temperature liquid or gas protective layer is established on the surface of the thrust chamber wall to reduce the heat flow to the thrust chamber wall, reduce the wall temperature, and achieve cooling. Internal cooling is mainly divided into three methods: internal cooling (shield cooling), membrane cooling and diaphoretic cooling of head tissues. After the internal cooling measures are adopted in the thrust chamber, the mixing ratio near the wall of the combustion chamber is different from the optimal mixing ratio in the central area (in most cases, the near-wall layer rich in fuel is used) due to the need to reduce the temperature of the protective layer, resulting in the uneven distribution of the mixing ratio along the cross-section of the combustion chamber, so that the combustion efficiency is reduced to a certain extent.

Membrane cooling is similar to shield cooling in that it cools the thrust chamber wall by establishing a uniform and stable coolant film or air film protective layer near the inner wall surface, except that the coolant used to establish the protective layer is not injected by the injector, but is supplied through a special cooling belt. The cooling band is generally arranged in a cross-section of the combustion chamber or the convergence section of the nozzle. There can be several cooling bands along the length of the combustion chamber.

In order to improve the stability of the membrane, the coolant often flows through the gaps or small holes in the cooling belts, and when sweating is used, the thrust chamber wall or part of the inner wall is made of porous material with a pore diameter of tens of microns. Porous materials are usually sintered with metal powders or pressed with metal mesh. In this case, the number of pores per unit area is increased by making the micropores in the material as evenly distributed as possible.

The liquid coolant penetrates into the inner wall, creating a protective film that reduces the density of the heat transferred to the wall. When the flow rate of liquid coolant used for sweat cooling is above a certain threshold, a liquid film is formed near the wall of the thrust chamber. When the coolant flow rate is below the critical flow, the inner wall temperature will be higher than the coolant boiling point at the current pressure, and some or all of the coolant will evaporate, forming an air film.

In addition to the above thermal protection, there are other thermal protection methods such as: ablation cooling, thermal insulation cooling, hot melt cooling and composite protection of chamber walls. 3. Thermal protection scheme of high enthalpy gas generator Based on the above methods and the actual situation, the thermal protection method of high enthalpy gas generator is obtained.

The combustion chamber of a high-enthalpy gas generator differs from that of a liquid rocket engine, eliminating the front thrust chamber part, making its structure simpler and more effective. Then, the thermal protection involved is the thermal protection part of the combustion chamber wall. As the fuel enters the combustion chamber, it quickly decomposes and releases large quantities.

You buy a set of equipment down, there is a maintenance manual, just follow the operation.

1. Functional check:

Check the appearance of the phone for damage? Turn on the machine to check whether the operation function is normal.

2. Clean your phone:

1. Turn off the power of your phone.

2. Clean the surface of the mobile phone with a small cloth dipped in an appropriate amount of alcohol, and remove the removable back cover to clean.

3. Start the vacuum switch of the machine, and use the vacuum pipe to suction the place where there are gaps and holes in the handpiece.

4. Turn off the vacuum on/off.

3. Choose the appropriate fixture for the mobile phone

1. Choose a suitable fixture according to the size of the mobile phone, pay attention to the fixture can not be too tight, so as not to crush the mobile phone screen, if the fixture is too large, pad a small gasket next to the fixture.

2. Insert the mobile phone into the space of the fixture, pay attention to avoid the keys or holes, so as not to affect the coating effect, and the coating can be completed after the inspection is completed.

Fourth, the operation process of empty true coating:

1. Add an appropriate amount of nano liquid to the two atomizing cups.

2. Put the clamped mobile phone into the vacuum atomization chamber.

3. Close the lid of the vacuum chamber.

4. Press the start button (pay attention to the air pressure of the barometer during the vacuum atomization process, and the normal thing is to pay attention to whether the nano liquid atomization is normal).

5. Drying mobile phones:

1. Take out the mobile phone after vacuum plating.

2. Put the phone in the oven and bake for 5 minutes.

First, the operation of the electric control cabinet.

1.Boiling water pump, air source.

2.Turn on the total power supply.

3.Turn on the power supply of the maintenance pump and vacuum gauge, and wait for its value to be less than 10 before entering the next operation. It takes about 5 minutes.

4.Turn on the mechanical pump, pump, turn on the power supply of the turbomolecular pump, start, change the vacuum gauge switch to the V2 position, and pump until it is less than 2, which takes about 20 minutes.

5.After the reading of the turbomolecular pump reaches 250, close the pumping, open the front machine and the high valve to continue vacuuming, and only after the vacuum reaches a certain level can the high vacuum gauge on the right be opened to observe the vacuum degree. After the vacuum reaches 2 10-3, the electron gun can be powered on.

Second, the operation of the DEF-6B electron gun power cabinet.

1.Total power.

2.Open the electron gun control and the electron gun control power supply at the same time: press the electron gun to control the power supply, delay switch, delay, power supply and protection light on, delay and protection light off after three minutes, if the back door is not closed or the water relay is faulty, the protection light will be always on.

3.Turn on the high voltage, the high voltage will reach more than 10kV, the adjustment beam current can be about 200mA, the curtain grid is 20V 100mA, the filament current, the deflection current swing between 1.

3. Shutdown sequence.

1.Turn off the high vacuum gauge and turn off the molecular pump.

2.When the molecular pump is displayed to 50, turn off the high valve, the forestage, and the mechanical pump in turn, which takes about 40 minutes.

3.When it is below 50, turn off the maintenance pump again.

1, the cooling effect of the cooling water is reduced, it may be that the cooling water is blocked or partially blocked 2, the thermostat of the dp pump is broken, for example, when it is actually 100 degrees, it is judged to be 200 degrees, so the alarm is called.

The above is more likely.

The DP pump works on the principle that when the oil evaporates, the viscous oil vapor is sprayed and the air is taken away, the oil cools and flows back, and the air is discharged.

Oil diffusion pumps.

The oil diffusion pump is a kind of vapor jet pump, and its working principle is to transfer the kinetic energy of the working medium (diffusion pump oil) to the pumped gas in the pumping direction as the basis. The pumping process of the diffusion pump is the process in which the pumped gas is diffused into the oil vapor jet and carried to the pump outlet for removal. Its operating ultimate vacuum is in the range of 10-2 10-5 Pa.

The operating range of the diffusion pump applied to the equipment is in the range of 10-2 to 10-4 Pa.

Factors influencing the performance of a diffusion pump:

Reflux of diffuse pump oil vapor.

a.Evaporation of oil film and oil droplets on the surface of the pump wall.

b.The reflection of the high-velocity oil vapor stream from the nozzle after it hits the pump wall.

c.The evaporation of the oil film and oil droplets on the surface of the primary nozzle.

d.Scattering of high-velocity oil vapor streams at the edge of the nozzle.

e.At room temperature, the oil migrates along the pump wall to the surface.

Reverse diffusion of gas molecules.

Cracking and decomposition of diffusion pump oil (oil oxidation without pumping rate).

Vacuum pumps that are not cleaned cleanly, contaminants remain inside the pump and the cycle is repeated.

In view of the above reasons, in the process of using the oil diffusion pump, some devices are added to prevent the occurrence of the above phenomenon, and the cold trap added to the vacuum system is to prevent the reflux of the oil vapor of the diffusion pump. The addition of a trunk pump and a double mechanical pump is designed to reduce the pressure at the outlet of the diffusion pump (40pa). Minimize the reverse diffusion of gas molecules.

The use of qualified diffusion pump oil is to prevent the cracking and decomposition of diffusion pump oil.

Maintenance and maintenance of diffusion pump and handling of common problems:

The cooling water must be unobstructed during the working process of the diffusion pump, and the cooling water can be turned off only after the pump working fluid has been completely cooled after the heating is stopped.

When the diffusion pump stops working, the vacuum in the pump should be maintained to avoid deterioration of the pump oil.

The pumped gas should be dry, non-corrosive and dust-free gas.

If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid oil contamination and corrosion of various parts. And blow the remaining water in the cooling water jacket clean. The room temperature of the storage site should be between 10 and 40.

If there is a sudden deterioration in the performance of the diffusion pump during normal operation, the heater should be checked to see if it is normal.

After long-term operation, the performance of the diffusion pump will gradually deteriorate, and it should be overhauled regularly.

b.The parts and pump chambers are first cleaned with aviation gasoline, then scrubbed with silk dipped in ether or acetone, and placed at a temperature of 80 100 degrees Celsius or dried with a hair dryer.

c.After treatment, assemble in order, keep the pump core and the bottom of the pump perpendicular to the pump cavity concentric, and the nozzle clearance at all levels should be adjusted according to the original requirements.

1. The vacuum coating equipment should clean the studio once every 200 coating procedures are completed. The method is: infiltration quietly uses caustic soda (NaOH) saturated solution to repeatedly rub the slag to wash the wall of the vacuum chamber, (note that the human body can not directly contact the caustic soda solution to avoid burns) The purpose is to make the coated film aluminum (Al) react with NaOH, and the film layer falls off after the reaction, and releases hydrogen.

Then clean the vacuum chamber with clean water and clean the dirt in the fine suction valve with a cloth dipped in gasoline.

2. When the rough pump (high stuffy slide valve pump, rotary vane pump) works continuously for one month (halved in the rainy season), it needs to be replaced with new oil. The method is to unscrew the oil drain bolt, drain the old oil, and start the pump for a few seconds to completely drain the old oil in the pump.

Tighten the oil drain bolt and add new oil to the rated amount (oil sight glass). After continuous use for more than half a year, the oil cap should be opened when changing the oil, and the dirt in the box should be wiped clean with a cloth.

3. The diffusion pump has been used continuously for more than 6 months, the pumping speed has slowed down significantly, or the operation is improper, it has been filled into the atmosphere, the connecting water pipe has been removed, the electric stove plate has been removed, the first-stage nozzle has been wrung out, the pump cavity and pump bile have been cleaned with gasoline first, and then cleaned with washing powder mixed with water, and then thoroughly cleaned with clean water. Before restarting, pay attention to the leak detection work. Method:

Start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum level of the diffusion pump part reaches 6x10 Pa, otherwise the leak detection will be carried out. Check whether the joint is fitted with a rubber seal, or if the seal is crushed. It can be heated only after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.