Interferometer maintenance of white light interferometers

Routine maintenance of white light interferometer:

1. The instrument should be properly placed in a dry and clean room to prevent vibration, and the base should be supported when the instrument is moved to prevent the deformation of the guide rail.

2. When the optical parts are not in use, they should be stored in a clean dry basin to prevent mildew. Reflectors and beamsplitters are generally not allowed to be wiped, and when it is necessary to wipe, you must first carefully dust off the dust with a spare brush, and then use a degreasing cotton ball to drip alcohol and Y ether mixture.

3. The transmission parts should be well lubricated. In particular, the guide rail, screw rod, nut and shaft hole part should be lubricated with T5 precision instrument oil.

4. When using, the force of each adjustment part should be appropriate, and do not force rotation or hard wrenching.

5. The screw rod of the guide rail surface should be protected from scratching and rusting, and it should still be in a state of no loss of oil after use.

6. The screws on the finely adjusted instrument parts are coated with red paint, and should not be rotated without authorization.

The <> white light ridge hall branch interferometer is based on the principle of white light interferometry, combined with the precision Z-direction scanning module, 3D modeling algorithm, etc., to perform non-contact scanning of the surface of the device and establish the surface 3D image, and the 3D image of the device surface is processed and analyzed through the system software, and the 2D and 3D parameters reflecting the surface quality of the device are obtained. It can be widely used in semiconductor manufacturing and packaging process testing, 3C electronic glass screen and its precision accessories, optical processing, micro-nano materials and manufacturing, auto parts, MEMS devices and other ultra-precision processing industries, aerospace, scientific research institutes and other fields. It can measure the roughness, flatness, microgeometric contour, curvature, etc. of various types of object surfaces from ultra-smooth to rough, low reflectivity to high reflectivity, and from nanometer to micron workpieces.

White light interferometer: It is an instrument that analyzes the interference fringes formed by light after reflection from two non-annihilating surfaces.

An interferometer is an optical instrument that uses the principle of interferometry to measure the difference of optical path to determine the relevant physical quantities. Any change in the optical path difference between two coherent beams of light can very sensitively lead to the movement of the interference fringes, and the change in the optical path of a certain beam of coherent light is caused by the change in the geometric distance or refractive sailing index of the medium, so the small change in geometric length or refractive index can be measured by the movement of the interference fringes, so that other physical quantities related to this can be measured.

The main functions of a white light interferometer: observation, analysis, application. Changed to hail.

The main applications of the SJ6000 laser interferometer are as follows:

1.It has the detection function of realizing linearity, angle, straightness, perpendicularity and other geometric quantities. It can detect the linear positioning accuracy and repeated positioning accuracy of the motion guide rail of precision motion equipment such as CNC machine tools and coordinate measuring machines; At the same time, it can also detect the pitch angle, torsion angle, verticality and straightness of the moving guide; And it is possible to calibrate the rotary axis of the machine tool.

2.The error compensation table can be automatically generated according to the compensation method set by the user to meet the requirements of machine tool error correction.

3.It has the functions of dynamic measurement (displacement-time curve, velocity-time curve, acceleration-time curve) and amplitude and frequency analysis, and can be used for machine tool vibration measurement and analysis, dynamic characteristics analysis of ball screws, response characteristics analysis of drive systems, dynamic characteristics analysis of guide rails, etc.

4.Built-in domestic and foreign standards, such as national standard (GB), ISO (INTERNATIONAL), BS (imperial system), American standard, DIN (German standard), JIS (Japanese standard), etc. The data can be analyzed and processed according to a variety of machine standards, and the corresponding curves and data reports can be printed.

(1) Geometric accuracy detection can be used to detect straightness, perpendicularity, pitch and yaw, flatness, parallelism, etc.

2) Detection of position accuracy and its automatic compensation It can detect the positioning accuracy, repeated positioning accuracy, and micro displacement accuracy of CNC machine tools. The use of Renishaw ML10 laser interferometer can not only automatically measure the error of the machine, but also automatically compensate for its linearity error through the RS232 interface, which saves a lot of time compared to the usual compensation method, and avoids the operator error caused by manual calculation and manual CNC keying, and can maximize the number of compensation points on the axis to be measured, so that the machine can achieve the best accuracy, and the operator does not need to have knowledge of machine parameters and compensation methods.

3) Detection and automatic compensation of the indexing accuracy of the CNC turntable Now, the ML10 laser interferometer and the RX10 turntable reference can also be used for automatic measurement of the rotary axis. It can measure any angular position at any angle, at any angle interval, with an accuracy of 1. The new technology has been recommended by new international standards.

Compared with the traditional method of using autocollimators and polyhedra, it not only saves a lot of measurement time, but also obtains a complete accuracy curve of the rotary axis, knows every detail of its accuracy, and gives statistical results processed according to the relevant standards.

4) Detection of dual-axis positioning accuracy and its automatic compensation Renishaw's dual-laser interferometer system can simultaneously measure the positioning accuracy of a certain axial movement of a large gantry mobile CNC machine tool driven by two servos, and can also automatically compensate for the two-axis linearity error through the RS232 interface.

5) Dynamic performance testing of CNC machine tools Using Renishaw dynamic characteristics measurement and evaluation software, laser interferometer can be used for machine tool vibration testing and analysis (FFT), ball screw dynamic characteristics analysis, servo drive system response characteristics analysis, guide rail dynamic characteristics (low-speed crawling) analysis, etc.

Laser interferometer can be applied to the linear positioning accuracy and repeated positioning accuracy of the motion guide rail of precision motion equipment such as CNC machine tools and coordinate measuring machines, and can also detect the pitch angle, torsion angle, verticality, and straightness of the motion guide, and can calibrate the rotary axis of the machine tool. The SJ6000 laser interferometer can realize the linear measurement of accuracy in combination with the linear mirror group, and the measurement of parameters such as angle, straightness (parallelism), flatness, perpendicularity, and rotary axis can also be realized in combination with the corresponding mirror group, and dynamic analysis can be carried out.

Laser interferometer has the advantages of high measurement accuracy, fast measurement speed, large measurement range and high resolution. Laser interferometer is currently recognized as a high-precision, high-sensitivity detection means, through the combination of different optical components, can achieve linearity, angle, flatness, straightness (parallelism), perpendicularity, rotary axis and other parameters of precision measurement, and can carry out dynamic performance analysis of the equipment such as speed, acceleration, frequency-amplitude, time-displacement, etc. With the cooperation of relevant detection software, the error compensation scheme can be automatically generated to provide a basis for equipment error correction.

The laser interferometer adopts high-stability HeNe laser imported from the United States and laser dual longitudinal mode thermal frequency stabilization technology to achieve fast and high precision (strong anti-interference ability, long-term stability of laser output; High-precision environmental compensation module, high-precision laser interferometric signal processing system, high-performance computer control system technology, combined with linear mirror group, can achieve accurate linear measurement; Combined with the corresponding lens group, it can also realize the measurement of angles, straightness (parallelism), flatness, perpendicularity, rotary axis and other parameters, and perform dynamic analysis.

White light interferometer is used to measure the surface of various precision devices at the nanoscale level, it is based on the principle of white light interferometry technology, the light emitted by the light source is divided into two beams after beam expansion collimation through the beamsplitter prism, one beam is reflected back by the measured surface, the other beam of light is reflected by the reference mirror, the two beams of reflected light finally converge and interfere, the microscope converts the morphological characteristics of the measured surface into an interference fringe signal, and measures the three-dimensional topography of the surface by measuring the change of the interference fringes.

The white light interferometer is dedicated to non-contact rapid measurement, and the measurement accuracy of the surface roughness, micro-topography and size of the key parts of precision parts can reach the nanometer level! At present, in the field of 3D measurement, white light interferometer is one of the most accurate measuring instruments.

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White light interferometer? In the previous diagram, what is the structure?

An interferometer is an instrument that analyzes the interference fringes formed by the reflection of light on two different surfaces. The basic principle is to form a reference and detection optical path through different optical components.

The optical fiber Mach-Zehnder interferometer uses the optical splitting and photosynthesis characteristics of the coupler to divide the input light into two beams of equal size, which are transmitted through two interference arms, and the two arms meet at the output end to form interference in space.

SJ6000 laser interferometer products have the advantages of high measurement accuracy, fast measurement speed, high resolution at the highest speed measurement, and large measurement range. By combining with different optical components, it is possible to measure a variety of geometric precisions such as straightness, perpendicularity, angle, flatness, parallelism, etc. With the cooperation of relevant software, the dynamic performance of CNC machine tools can also be tested, machine tool vibration testing and analysis, ball screw dynamic characteristics analysis, drive system response characteristics analysis, guide rail dynamic characteristics analysis, etc., with extremely high precision and efficiency, providing a basis for machine tool error correction.

Laser interferometer is a measurement and testing method based on light wave as the carrier and light wave wavelength as the unit, which is recognized as a high-precision and high-sensitivity detection method, and is widely used in the field of high-end manufacturing.

Lasers have the advantages of high intensity, high directionality, spatial homogeneity, narrow bandwidth and high monochromaticity. At present, the interferometer commonly used to measure the length is mainly based on Michelson interferometer, and the constant-frequency helium-neon laser is used as the light source to form a measurement system with interferometric effect. The laser interferometer can be used with various refractors, mirrors, etc. to measure linear position, speed, angle, flatness, straightness, parallelism and perpendicularity, and can be used as a precision machine tool or measuring instrument for calibration.

English name: laser interferometer (laser interferometer).

Laser interferometer generally adopts imported high-stability helium-neon laser and laser dual-longitudinal mode thermal frequency stabilization technology to achieve fast (about 6 minutes), high-precision (strong anti-interference ability, long-term stability of laser output; High-precision environmental compensation module, high-precision laser interferometric signal processing system, high-performance computer control system technology, combined with linear mirror group, can achieve accurate linear measurement; Combined with the corresponding mirror group, it can also realize the measurement of angles, straightness (parallelism), flatness, perpendicularity, rotary axis and other parameters, and carry out static measurement and dynamic measurement analysis.

The SJ6000 laser interferometer has high measurement accuracy, can automatically monitor the parameters of ambient temperature, material temperature, ambient humidity and atmospheric pressure, and can manually or automatically select environmental compensation. The laser interferometer measurement record can query and manage the verification results according to the type of object to be measured, the production unit, the number, the inspector, the inspection unit, the verification date, the equipment number and the effective date, etc., and the data can be printed into a document or a form.